Deposition and Patterning of Thin-film Materials on Curved Surfaces Using Microfluidic Methods
نویسندگان
چکیده
In this paper, we present a microfluidic technique that overcomes many of the limitations currently faced by photolithography-based approaches. In-situ deposition can be used to produce precision patterns of thin-film materials (silver, gold, photoresist) on various substrates with a broad range of shapes, sizes, and curvatures in a rapid and straightforward manner. The surface profile, mechanical gauge factor, and temperature coefficient of resistance for silver films has been characterized. We also demonstrate, as applications of the method, the fabrication of strain gauges and hot-wire flow sensors.
منابع مشابه
Microfluidic method for in-situ deposition and precision patterning of thin-film metals on curved surfaces
We present a technique for patterning thin-film metals (silver and gold) without the need for photolithography. The technique involves microfluidics and can be performed on planar or curved surfaces. Patterns of thin-film metal are fabricated by flowing electroless silver or gold plating solutions through predefined microchannels made of polydimethylsiloxane sealed against a surface of interest...
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